JPS6445172U - - Google Patents

Info

Publication number
JPS6445172U
JPS6445172U JP13480687U JP13480687U JPS6445172U JP S6445172 U JPS6445172 U JP S6445172U JP 13480687 U JP13480687 U JP 13480687U JP 13480687 U JP13480687 U JP 13480687U JP S6445172 U JPS6445172 U JP S6445172U
Authority
JP
Japan
Prior art keywords
graphite crucible
center
radial direction
outer bottom
umbrella
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13480687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13480687U priority Critical patent/JPS6445172U/ja
Publication of JPS6445172U publication Critical patent/JPS6445172U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP13480687U 1987-09-03 1987-09-03 Pending JPS6445172U (el)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13480687U JPS6445172U (el) 1987-09-03 1987-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13480687U JPS6445172U (el) 1987-09-03 1987-09-03

Publications (1)

Publication Number Publication Date
JPS6445172U true JPS6445172U (el) 1989-03-17

Family

ID=31393883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13480687U Pending JPS6445172U (el) 1987-09-03 1987-09-03

Country Status (1)

Country Link
JP (1) JPS6445172U (el)

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