JPS6444630U - - Google Patents

Info

Publication number

JPS6444630U

JPS6444630U JP13867987U JP13867987U JPS6444630U JP S6444630 U JPS6444630 U JP S6444630U JP 13867987 U JP13867987 U JP 13867987U JP 13867987 U JP13867987 U JP 13867987U JP S6444630 U JPS6444630 U JP S6444630U

Authority

JP

Japan

Prior art keywords

chamber

vacuum

bottom plate

moving stage

moving

Prior art date

1987-09-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000463 material Substances 0.000 claims description 2
• 238000001459 lithography Methods 0.000 claims 1
• 238000002039 particle-beam lithography Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000002955 isolation Methods 0.000 description 1
• 238000012856 packing Methods 0.000 description 1