JPS644436U - - Google Patents
Info
- Publication number
- JPS644436U JPS644436U JP9782087U JP9782087U JPS644436U JP S644436 U JPS644436 U JP S644436U JP 9782087 U JP9782087 U JP 9782087U JP 9782087 U JP9782087 U JP 9782087U JP S644436 U JPS644436 U JP S644436U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- stage
- shape
- direct
- irradiates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000059 patterning Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9782087U JPS644436U (es) | 1987-06-25 | 1987-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9782087U JPS644436U (es) | 1987-06-25 | 1987-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS644436U true JPS644436U (es) | 1989-01-11 |
Family
ID=31323549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9782087U Pending JPS644436U (es) | 1987-06-25 | 1987-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS644436U (es) |
-
1987
- 1987-06-25 JP JP9782087U patent/JPS644436U/ja active Pending