JPS6443938A - Pressure switch - Google Patents

Pressure switch

Info

Publication number
JPS6443938A
JPS6443938A JP20054587A JP20054587A JPS6443938A JP S6443938 A JPS6443938 A JP S6443938A JP 20054587 A JP20054587 A JP 20054587A JP 20054587 A JP20054587 A JP 20054587A JP S6443938 A JPS6443938 A JP S6443938A
Authority
JP
Japan
Prior art keywords
base
fixed contact
diaphragm
installing
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20054587A
Other languages
Japanese (ja)
Inventor
Yukio Iwasaki
Tamotsu Horiba
Norihiko Terasawa
Hideki Miyatake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Rika Co Ltd
Original Assignee
Tokai Rika Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Rika Co Ltd filed Critical Tokai Rika Co Ltd
Priority to JP20054587A priority Critical patent/JPS6443938A/en
Publication of JPS6443938A publication Critical patent/JPS6443938A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]

Landscapes

  • Switches Operated By Changes In Physical Conditions (AREA)

Abstract

PURPOSE:To aim at reduction in the number of part items and improvement in assembling operability by installing a traveling contact in a diaphragm being formed in a base and deformed by receiving fluid pressure, and furthermore installing a fixed contact, to be opposed to this traveling contact at the specified interval, in the base. CONSTITUTION:Recesses 2 and 3 are formed in a base 1 consisting of a silicone wafer by means of etching or the like and, after a diaphragm 4 to be deformed by receiving pressure is formed, an electrode film 7 is evaporated or spattered on this diaphragm 4 so as to cover the projection 6, thus a traveling contact 5 is installed there. Another electrode film 11 is evaporated and spattered on the base 1 and a fixed contact 10 is formed, and furthermore, a reinforcer 14 is formed on the fixed contact 10 by means of evaporation or CVD (chemical vapor deposition). With this constitution, a base as a separate body for installing the fixed contact can be made unnecessary, therefore the number of part items becomes reduced and, what is more, such assembly operation as bonding base-to- base adhesion in precision is brought to nothing, thus assembly operability is improved.
JP20054587A 1987-08-11 1987-08-11 Pressure switch Pending JPS6443938A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20054587A JPS6443938A (en) 1987-08-11 1987-08-11 Pressure switch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20054587A JPS6443938A (en) 1987-08-11 1987-08-11 Pressure switch

Publications (1)

Publication Number Publication Date
JPS6443938A true JPS6443938A (en) 1989-02-16

Family

ID=16426087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20054587A Pending JPS6443938A (en) 1987-08-11 1987-08-11 Pressure switch

Country Status (1)

Country Link
JP (1) JPS6443938A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10279100B2 (en) 2012-09-28 2019-05-07 Nikkiso Co., Ltd. Indwelling needle for extracorporeal circulation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10279100B2 (en) 2012-09-28 2019-05-07 Nikkiso Co., Ltd. Indwelling needle for extracorporeal circulation

Similar Documents

Publication Publication Date Title
EP0045858A3 (en) Plasma etching electrode
TW362338B (en) Composite electrode for plasma processes
TW352457B (en) Chemical vapor phase growth apparatus (3)
DE69016321T2 (en) Electrically insulated bearing.
KR960015781A (en) Plasma Guard for Chambers with Electrostatic Chokes
EP0392010A4 (en) Body fluid filter having flat film permeative membranes having protrusions.
UA18259A (en) StarWriterMETHOD FOR CONTROL OF PLASMA DEPOSITION OF THIN FILMS IN VACUUM
WO2003008666B1 (en) Electrostatic chuck with dielectric coating
EP1024512A4 (en) Electrostatic micro-relay
KR970070241A (en) Plasma etching electrode
JPS6443938A (en) Pressure switch
GB1517896A (en) Vacuum switches
EP0778599A3 (en) Switch with a temperature sensitive switching mechanism
TW428207B (en) Vacuum container for field emission cathode device
JPS55154351A (en) Hydrophilic membrane
US5905235A (en) Key assembly
EP0181130A2 (en) Push-button switch structure for telephone or the like
EP0208459A3 (en) Process for the chemical vapour deposition of a thin film of oxide on a silicon wafer
JPS5257704A (en) Panel spring switching mechanism
ATE40192T1 (en) COMPOSITE TYPE SEALING RING.
JPH031866Y2 (en)
DE3272049D1 (en) Support for a closure assembly
EP0416982A3 (en) Plasma enhanced chemical vapor deposition/etching improved uniformity by electrode modifications
JPS6475680A (en) Plasma cvd device
JPS57203769A (en) Optical thin film vapor-deposition device