JPS6442129U - - Google Patents

Info

Publication number
JPS6442129U
JPS6442129U JP13811987U JP13811987U JPS6442129U JP S6442129 U JPS6442129 U JP S6442129U JP 13811987 U JP13811987 U JP 13811987U JP 13811987 U JP13811987 U JP 13811987U JP S6442129 U JPS6442129 U JP S6442129U
Authority
JP
Japan
Prior art keywords
far
packaging material
infrared radiation
ceramic particles
material according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13811987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13811987U priority Critical patent/JPS6442129U/ja
Publication of JPS6442129U publication Critical patent/JPS6442129U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Wrappers (AREA)
JP13811987U 1987-09-09 1987-09-09 Pending JPS6442129U (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13811987U JPS6442129U (no) 1987-09-09 1987-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13811987U JPS6442129U (no) 1987-09-09 1987-09-09

Publications (1)

Publication Number Publication Date
JPS6442129U true JPS6442129U (no) 1989-03-14

Family

ID=31400161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13811987U Pending JPS6442129U (no) 1987-09-09 1987-09-09

Country Status (1)

Country Link
JP (1) JPS6442129U (no)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0428680U (no) * 1990-06-29 1992-03-06
US7264680B2 (en) 1997-05-09 2007-09-04 Semitool, Inc. Process and apparatus for treating a workpiece using ozone
US7360546B2 (en) 2002-04-09 2008-04-22 Sharp Kabushiki Kaisha Cleaning apparatus for semiconductor wafer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0428680U (no) * 1990-06-29 1992-03-06
US7264680B2 (en) 1997-05-09 2007-09-04 Semitool, Inc. Process and apparatus for treating a workpiece using ozone
US7360546B2 (en) 2002-04-09 2008-04-22 Sharp Kabushiki Kaisha Cleaning apparatus for semiconductor wafer

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