JPS644014A - Photo-cvd device - Google Patents

Photo-cvd device

Info

Publication number
JPS644014A
JPS644014A JP15765187A JP15765187A JPS644014A JP S644014 A JPS644014 A JP S644014A JP 15765187 A JP15765187 A JP 15765187A JP 15765187 A JP15765187 A JP 15765187A JP S644014 A JPS644014 A JP S644014A
Authority
JP
Japan
Prior art keywords
specimen
laser
light
turned
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15765187A
Other languages
English (en)
Inventor
Hisayuki Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15765187A priority Critical patent/JPS644014A/ja
Publication of JPS644014A publication Critical patent/JPS644014A/ja
Pending legal-status Critical Current

Links

JP15765187A 1987-06-26 1987-06-26 Photo-cvd device Pending JPS644014A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15765187A JPS644014A (en) 1987-06-26 1987-06-26 Photo-cvd device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15765187A JPS644014A (en) 1987-06-26 1987-06-26 Photo-cvd device

Publications (1)

Publication Number Publication Date
JPS644014A true JPS644014A (en) 1989-01-09

Family

ID=15654385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15765187A Pending JPS644014A (en) 1987-06-26 1987-06-26 Photo-cvd device

Country Status (1)

Country Link
JP (1) JPS644014A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011060796A (ja) * 2009-09-07 2011-03-24 Hitachi Zosen Corp 薄膜堆積方法およびその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011060796A (ja) * 2009-09-07 2011-03-24 Hitachi Zosen Corp 薄膜堆積方法およびその装置

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