JPS6440066U - - Google Patents

Info

Publication number
JPS6440066U
JPS6440066U JP13563487U JP13563487U JPS6440066U JP S6440066 U JPS6440066 U JP S6440066U JP 13563487 U JP13563487 U JP 13563487U JP 13563487 U JP13563487 U JP 13563487U JP S6440066 U JPS6440066 U JP S6440066U
Authority
JP
Japan
Prior art keywords
movable range
conveyance
platform
conveyance table
air bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13563487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH056545Y2 (pl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13563487U priority Critical patent/JPH056545Y2/ja
Publication of JPS6440066U publication Critical patent/JPS6440066U/ja
Application granted granted Critical
Publication of JPH056545Y2 publication Critical patent/JPH056545Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Non-Mechanical Conveyors (AREA)
JP13563487U 1987-09-04 1987-09-04 Expired - Lifetime JPH056545Y2 (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13563487U JPH056545Y2 (pl) 1987-09-04 1987-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13563487U JPH056545Y2 (pl) 1987-09-04 1987-09-04

Publications (2)

Publication Number Publication Date
JPS6440066U true JPS6440066U (pl) 1989-03-09
JPH056545Y2 JPH056545Y2 (pl) 1993-02-19

Family

ID=31395436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13563487U Expired - Lifetime JPH056545Y2 (pl) 1987-09-04 1987-09-04

Country Status (1)

Country Link
JP (1) JPH056545Y2 (pl)

Also Published As

Publication number Publication date
JPH056545Y2 (pl) 1993-02-19

Similar Documents

Publication Publication Date Title
JPS6440066U (pl)
JPS6258742U (pl)
JPH0265174U (pl)
JPS60167643U (ja) 搬送装置
JPS588535U (ja) 組立て作業ラインからの被搬送物搬出装置
JPS6282731U (pl)
JPS615552U (ja) パレツト交換装置
JPS645791A (en) Substrate processing equipment
JPS63193640U (pl)
JPS63202493U (pl)
JPS588534U (ja) 組立て作業ラインからの作業台搬出装置
JPS6353635U (pl)
JPH02185055A (ja) 半導体装置の位置決め装置
JPS59116841U (ja) 計測装置の較正装置
EP0308250A3 (en) Measurement and levelling apparatus
JPS6199490U (pl)
JPS6121726U (ja) 段重ね装置
JPS63178210U (pl)
NL7706548A (nl) Kraanarm-systeem voor pneumatische transportinstal- laties meer in het bijzonder voor zuighef-inrich- tingen.
JPH0280510U (pl)
JPS6087637U (ja) 作業台装置
JPH045321U (pl)
JPH0190715U (pl)
JPS62200677U (pl)
JPS5926484U (ja) リフト