JPS6440066U - - Google Patents

Info

Publication number
JPS6440066U
JPS6440066U JP13563487U JP13563487U JPS6440066U JP S6440066 U JPS6440066 U JP S6440066U JP 13563487 U JP13563487 U JP 13563487U JP 13563487 U JP13563487 U JP 13563487U JP S6440066 U JPS6440066 U JP S6440066U
Authority
JP
Japan
Prior art keywords
movable range
conveyance
platform
conveyance table
air bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13563487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH056545Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13563487U priority Critical patent/JPH056545Y2/ja
Publication of JPS6440066U publication Critical patent/JPS6440066U/ja
Application granted granted Critical
Publication of JPH056545Y2 publication Critical patent/JPH056545Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Non-Mechanical Conveyors (AREA)
JP13563487U 1987-09-04 1987-09-04 Expired - Lifetime JPH056545Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13563487U JPH056545Y2 (enrdf_load_stackoverflow) 1987-09-04 1987-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13563487U JPH056545Y2 (enrdf_load_stackoverflow) 1987-09-04 1987-09-04

Publications (2)

Publication Number Publication Date
JPS6440066U true JPS6440066U (enrdf_load_stackoverflow) 1989-03-09
JPH056545Y2 JPH056545Y2 (enrdf_load_stackoverflow) 1993-02-19

Family

ID=31395436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13563487U Expired - Lifetime JPH056545Y2 (enrdf_load_stackoverflow) 1987-09-04 1987-09-04

Country Status (1)

Country Link
JP (1) JPH056545Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH056545Y2 (enrdf_load_stackoverflow) 1993-02-19

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