JPS6440042U - - Google Patents

Info

Publication number
JPS6440042U
JPS6440042U JP13665787U JP13665787U JPS6440042U JP S6440042 U JPS6440042 U JP S6440042U JP 13665787 U JP13665787 U JP 13665787U JP 13665787 U JP13665787 U JP 13665787U JP S6440042 U JPS6440042 U JP S6440042U
Authority
JP
Japan
Prior art keywords
flexible substrate
thick film
carbon resistor
polyimide flexible
film carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13665787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13665787U priority Critical patent/JPS6440042U/ja
Publication of JPS6440042U publication Critical patent/JPS6440042U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP13665787U 1987-09-07 1987-09-07 Pending JPS6440042U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13665787U JPS6440042U (US06521211-20030218-C00004.png) 1987-09-07 1987-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13665787U JPS6440042U (US06521211-20030218-C00004.png) 1987-09-07 1987-09-07

Publications (1)

Publication Number Publication Date
JPS6440042U true JPS6440042U (US06521211-20030218-C00004.png) 1989-03-09

Family

ID=31397367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13665787U Pending JPS6440042U (US06521211-20030218-C00004.png) 1987-09-07 1987-09-07

Country Status (1)

Country Link
JP (1) JPS6440042U (US06521211-20030218-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010002407A (ja) * 2008-06-20 2010-01-07 Korea Research Inst Of Standards & Science メンブレン構造を有する触覚センサー及びその製作方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5975676A (ja) * 1982-10-22 1984-04-28 Tokyo Electric Co Ltd 歪センサ
JPS6038634A (ja) * 1983-07-08 1985-02-28 ケント‐テイエギ・エッセ・ピー・アー 工業プロセス流体用の静圧変動補償付き差圧伝送器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5975676A (ja) * 1982-10-22 1984-04-28 Tokyo Electric Co Ltd 歪センサ
JPS6038634A (ja) * 1983-07-08 1985-02-28 ケント‐テイエギ・エッセ・ピー・アー 工業プロセス流体用の静圧変動補償付き差圧伝送器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010002407A (ja) * 2008-06-20 2010-01-07 Korea Research Inst Of Standards & Science メンブレン構造を有する触覚センサー及びその製作方法

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