JPS643981A - Heating device - Google Patents
Heating deviceInfo
- Publication number
- JPS643981A JPS643981A JP15931287A JP15931287A JPS643981A JP S643981 A JPS643981 A JP S643981A JP 15931287 A JP15931287 A JP 15931287A JP 15931287 A JP15931287 A JP 15931287A JP S643981 A JPS643981 A JP S643981A
- Authority
- JP
- Japan
- Prior art keywords
- protection tube
- electrodes
- heating wire
- tube
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Resistance Heating (AREA)
Abstract
PURPOSE:To detect breakage accidents of a heating wire protecting tube immediately so as to prevent a semiconductor substrate or the like from being contaminated to the minimum due to chemicals, by equipping a means for detecting the breakage of the protection tube so that liquids invading the inside of the protection tube are detected. CONSTITUTION:This device is equipped with the following parts: a pair of electrodes 4 and 5 which are disposed to face and fixed by an electrode fixing tube 3 on an inner wall of a heating wire protection tube 2 where a heating wire 1 is housed, power sources 6 and 7 which are connected with the heating wire 1 and the electrodes 4 and 5, a current detector 8 and an alarm device 9 which are connected between the electrodes 4 and 5. when the protection tube 2 is broken by heat distortion, vibration or impact, and the like, heating liquids invade this protection tube from this broken part, and then the two facing electrodes 4 and 5 are shorted to conduct a current therebetween, and this current is detected by the detector 8 to operate the alarm device 9. Accordingly, an operator can be informed of breakage accidents occurring at the protection tube 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15931287A JPS643981A (en) | 1987-06-25 | 1987-06-25 | Heating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15931287A JPS643981A (en) | 1987-06-25 | 1987-06-25 | Heating device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS643981A true JPS643981A (en) | 1989-01-09 |
Family
ID=15691048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15931287A Pending JPS643981A (en) | 1987-06-25 | 1987-06-25 | Heating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS643981A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104219805A (en) * | 2013-06-03 | 2014-12-17 | 北京中科联众科技股份有限公司 | Carbon heater with coupling mechanism |
-
1987
- 1987-06-25 JP JP15931287A patent/JPS643981A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104219805A (en) * | 2013-06-03 | 2014-12-17 | 北京中科联众科技股份有限公司 | Carbon heater with coupling mechanism |
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