JPS643981A - Heating device - Google Patents

Heating device

Info

Publication number
JPS643981A
JPS643981A JP15931287A JP15931287A JPS643981A JP S643981 A JPS643981 A JP S643981A JP 15931287 A JP15931287 A JP 15931287A JP 15931287 A JP15931287 A JP 15931287A JP S643981 A JPS643981 A JP S643981A
Authority
JP
Japan
Prior art keywords
protection tube
electrodes
heating wire
tube
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15931287A
Other languages
Japanese (ja)
Inventor
Tsuneji Nakaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP15931287A priority Critical patent/JPS643981A/en
Publication of JPS643981A publication Critical patent/JPS643981A/en
Pending legal-status Critical Current

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  • Resistance Heating (AREA)

Abstract

PURPOSE:To detect breakage accidents of a heating wire protecting tube immediately so as to prevent a semiconductor substrate or the like from being contaminated to the minimum due to chemicals, by equipping a means for detecting the breakage of the protection tube so that liquids invading the inside of the protection tube are detected. CONSTITUTION:This device is equipped with the following parts: a pair of electrodes 4 and 5 which are disposed to face and fixed by an electrode fixing tube 3 on an inner wall of a heating wire protection tube 2 where a heating wire 1 is housed, power sources 6 and 7 which are connected with the heating wire 1 and the electrodes 4 and 5, a current detector 8 and an alarm device 9 which are connected between the electrodes 4 and 5. when the protection tube 2 is broken by heat distortion, vibration or impact, and the like, heating liquids invade this protection tube from this broken part, and then the two facing electrodes 4 and 5 are shorted to conduct a current therebetween, and this current is detected by the detector 8 to operate the alarm device 9. Accordingly, an operator can be informed of breakage accidents occurring at the protection tube 2.
JP15931287A 1987-06-25 1987-06-25 Heating device Pending JPS643981A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15931287A JPS643981A (en) 1987-06-25 1987-06-25 Heating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15931287A JPS643981A (en) 1987-06-25 1987-06-25 Heating device

Publications (1)

Publication Number Publication Date
JPS643981A true JPS643981A (en) 1989-01-09

Family

ID=15691048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15931287A Pending JPS643981A (en) 1987-06-25 1987-06-25 Heating device

Country Status (1)

Country Link
JP (1) JPS643981A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104219805A (en) * 2013-06-03 2014-12-17 北京中科联众科技股份有限公司 Carbon heater with coupling mechanism

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104219805A (en) * 2013-06-03 2014-12-17 北京中科联众科技股份有限公司 Carbon heater with coupling mechanism

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