JPS6439728U - - Google Patents

Info

Publication number
JPS6439728U
JPS6439728U JP13534987U JP13534987U JPS6439728U JP S6439728 U JPS6439728 U JP S6439728U JP 13534987 U JP13534987 U JP 13534987U JP 13534987 U JP13534987 U JP 13534987U JP S6439728 U JPS6439728 U JP S6439728U
Authority
JP
Japan
Prior art keywords
tips
extends
tubes
water
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13534987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0423551Y2 (US08177716-20120515-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987135349U priority Critical patent/JPH0423551Y2/ja
Publication of JPS6439728U publication Critical patent/JPS6439728U/ja
Application granted granted Critical
Publication of JPH0423551Y2 publication Critical patent/JPH0423551Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Massaging Devices (AREA)
JP1987135349U 1987-09-04 1987-09-04 Expired JPH0423551Y2 (US08177716-20120515-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987135349U JPH0423551Y2 (US08177716-20120515-C00003.png) 1987-09-04 1987-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987135349U JPH0423551Y2 (US08177716-20120515-C00003.png) 1987-09-04 1987-09-04

Publications (2)

Publication Number Publication Date
JPS6439728U true JPS6439728U (US08177716-20120515-C00003.png) 1989-03-09
JPH0423551Y2 JPH0423551Y2 (US08177716-20120515-C00003.png) 1992-06-02

Family

ID=31394893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987135349U Expired JPH0423551Y2 (US08177716-20120515-C00003.png) 1987-09-04 1987-09-04

Country Status (1)

Country Link
JP (1) JPH0423551Y2 (US08177716-20120515-C00003.png)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0578229U (ja) * 1992-03-30 1993-10-26 株式会社イナックス 浴 槽
US7364798B2 (en) 1999-12-10 2008-04-29 Tocalo Co., Ltd. Internal member for plasma-treating vessel and method of producing the same
US7494723B2 (en) 2005-07-29 2009-02-24 Tocalo Co., Ltd. Y2O3 spray-coated member and production method thereof
US7648782B2 (en) 2006-03-20 2010-01-19 Tokyo Electron Limited Ceramic coating member for semiconductor processing apparatus
US7767268B2 (en) 2005-09-08 2010-08-03 Tocalo Co., Ltd. Spray-coated member having an excellent resistance to plasma erosion and method of producing the same
US7850864B2 (en) 2006-03-20 2010-12-14 Tokyo Electron Limited Plasma treating apparatus and plasma treating method
US8877002B2 (en) 2002-11-28 2014-11-04 Tokyo Electron Limited Internal member of a plasma processing vessel

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6180026U (US08177716-20120515-C00003.png) * 1984-10-30 1986-05-28
JPS624329U (US08177716-20120515-C00003.png) * 1985-06-25 1987-01-12

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2526006A1 (fr) * 1982-04-30 1983-11-04 Comurhex Procede d'obtention de uo3 de grande surface specifique a partir de nitrate d'uranyle hydrate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6180026U (US08177716-20120515-C00003.png) * 1984-10-30 1986-05-28
JPS624329U (US08177716-20120515-C00003.png) * 1985-06-25 1987-01-12

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0578229U (ja) * 1992-03-30 1993-10-26 株式会社イナックス 浴 槽
US7364798B2 (en) 1999-12-10 2008-04-29 Tocalo Co., Ltd. Internal member for plasma-treating vessel and method of producing the same
US8877002B2 (en) 2002-11-28 2014-11-04 Tokyo Electron Limited Internal member of a plasma processing vessel
US7494723B2 (en) 2005-07-29 2009-02-24 Tocalo Co., Ltd. Y2O3 spray-coated member and production method thereof
US7767268B2 (en) 2005-09-08 2010-08-03 Tocalo Co., Ltd. Spray-coated member having an excellent resistance to plasma erosion and method of producing the same
US7648782B2 (en) 2006-03-20 2010-01-19 Tokyo Electron Limited Ceramic coating member for semiconductor processing apparatus
US7850864B2 (en) 2006-03-20 2010-12-14 Tokyo Electron Limited Plasma treating apparatus and plasma treating method

Also Published As

Publication number Publication date
JPH0423551Y2 (US08177716-20120515-C00003.png) 1992-06-02

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