JPS6439484U - - Google Patents

Info

Publication number
JPS6439484U
JPS6439484U JP13399387U JP13399387U JPS6439484U JP S6439484 U JPS6439484 U JP S6439484U JP 13399387 U JP13399387 U JP 13399387U JP 13399387 U JP13399387 U JP 13399387U JP S6439484 U JPS6439484 U JP S6439484U
Authority
JP
Japan
Prior art keywords
cryopump
case
stage
refrigerator
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13399387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13399387U priority Critical patent/JPS6439484U/ja
Publication of JPS6439484U publication Critical patent/JPS6439484U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP13399387U 1987-09-03 1987-09-03 Pending JPS6439484U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13399387U JPS6439484U (enrdf_load_stackoverflow) 1987-09-03 1987-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13399387U JPS6439484U (enrdf_load_stackoverflow) 1987-09-03 1987-09-03

Publications (1)

Publication Number Publication Date
JPS6439484U true JPS6439484U (enrdf_load_stackoverflow) 1989-03-09

Family

ID=31392367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13399387U Pending JPS6439484U (enrdf_load_stackoverflow) 1987-09-03 1987-09-03

Country Status (1)

Country Link
JP (1) JPS6439484U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6226575B2 (enrdf_load_stackoverflow) * 1979-06-12 1987-06-09 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6226575B2 (enrdf_load_stackoverflow) * 1979-06-12 1987-06-09 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai

Similar Documents

Publication Publication Date Title
JPS6439484U (enrdf_load_stackoverflow)
JPS633826U (enrdf_load_stackoverflow)
JPS6279871U (enrdf_load_stackoverflow)
JPS61196529U (enrdf_load_stackoverflow)
JPS6180995U (enrdf_load_stackoverflow)
JPS6423998U (enrdf_load_stackoverflow)
JPS63194292U (enrdf_load_stackoverflow)
JPS633327U (enrdf_load_stackoverflow)
JPS63157508U (enrdf_load_stackoverflow)
JPS63141832U (enrdf_load_stackoverflow)
JPS62176506U (enrdf_load_stackoverflow)
JPH0373661U (enrdf_load_stackoverflow)
JPS6425610U (enrdf_load_stackoverflow)
JPH01158078U (enrdf_load_stackoverflow)
JPS6290988U (enrdf_load_stackoverflow)
JPS62156103U (enrdf_load_stackoverflow)
JPS61182372U (enrdf_load_stackoverflow)
JPS6348949U (enrdf_load_stackoverflow)
JPS61101309U (enrdf_load_stackoverflow)
JPH0387984U (enrdf_load_stackoverflow)
JPS63166141U (enrdf_load_stackoverflow)
JPH02122001U (enrdf_load_stackoverflow)
JPS61117508U (enrdf_load_stackoverflow)
JPS63120003U (enrdf_load_stackoverflow)
JPS63146138U (enrdf_load_stackoverflow)