JPS6439484U - - Google Patents
Info
- Publication number
- JPS6439484U JPS6439484U JP13399387U JP13399387U JPS6439484U JP S6439484 U JPS6439484 U JP S6439484U JP 13399387 U JP13399387 U JP 13399387U JP 13399387 U JP13399387 U JP 13399387U JP S6439484 U JPS6439484 U JP S6439484U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- case
- stage
- refrigerator
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13399387U JPS6439484U (OSRAM) | 1987-09-03 | 1987-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13399387U JPS6439484U (OSRAM) | 1987-09-03 | 1987-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6439484U true JPS6439484U (OSRAM) | 1989-03-09 |
Family
ID=31392367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13399387U Pending JPS6439484U (OSRAM) | 1987-09-03 | 1987-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6439484U (OSRAM) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226575B2 (OSRAM) * | 1979-06-12 | 1987-06-09 | Cho Eru Esu Ai Gijutsu Kenkyu Kumiai |
-
1987
- 1987-09-03 JP JP13399387U patent/JPS6439484U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226575B2 (OSRAM) * | 1979-06-12 | 1987-06-09 | Cho Eru Esu Ai Gijutsu Kenkyu Kumiai |