JPS6438638U - - Google Patents
Info
- Publication number
- JPS6438638U JPS6438638U JP1987133040U JP13304087U JPS6438638U JP S6438638 U JPS6438638 U JP S6438638U JP 1987133040 U JP1987133040 U JP 1987133040U JP 13304087 U JP13304087 U JP 13304087U JP S6438638 U JPS6438638 U JP S6438638U
- Authority
- JP
- Japan
- Prior art keywords
- light
- shielding film
- photomask blank
- electrical conductivity
- transmitting substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987133040U JPS6438638U (lv) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987133040U JPS6438638U (lv) | 1987-08-31 | 1987-08-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6438638U true JPS6438638U (lv) | 1989-03-08 |
Family
ID=31390553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987133040U Pending JPS6438638U (lv) | 1987-08-31 | 1987-08-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6438638U (lv) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5596951A (en) * | 1979-01-17 | 1980-07-23 | Mitsubishi Electric Corp | Negative for photomask |
-
1987
- 1987-08-31 JP JP1987133040U patent/JPS6438638U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5596951A (en) * | 1979-01-17 | 1980-07-23 | Mitsubishi Electric Corp | Negative for photomask |