JPS6438248U - - Google Patents

Info

Publication number
JPS6438248U
JPS6438248U JP1987131530U JP13153087U JPS6438248U JP S6438248 U JPS6438248 U JP S6438248U JP 1987131530 U JP1987131530 U JP 1987131530U JP 13153087 U JP13153087 U JP 13153087U JP S6438248 U JPS6438248 U JP S6438248U
Authority
JP
Japan
Prior art keywords
polishing
polishing machine
sample
view
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987131530U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0613820Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987131530U priority Critical patent/JPH0613820Y2/ja
Publication of JPS6438248U publication Critical patent/JPS6438248U/ja
Application granted granted Critical
Publication of JPH0613820Y2 publication Critical patent/JPH0613820Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP1987131530U 1987-08-31 1987-08-31 機器分析用試料の研磨装置 Expired - Lifetime JPH0613820Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987131530U JPH0613820Y2 (ja) 1987-08-31 1987-08-31 機器分析用試料の研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987131530U JPH0613820Y2 (ja) 1987-08-31 1987-08-31 機器分析用試料の研磨装置

Publications (2)

Publication Number Publication Date
JPS6438248U true JPS6438248U (hu) 1989-03-07
JPH0613820Y2 JPH0613820Y2 (ja) 1994-04-13

Family

ID=31387686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987131530U Expired - Lifetime JPH0613820Y2 (ja) 1987-08-31 1987-08-31 機器分析用試料の研磨装置

Country Status (1)

Country Link
JP (1) JPH0613820Y2 (hu)

Also Published As

Publication number Publication date
JPH0613820Y2 (ja) 1994-04-13

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