JPS6438172U - - Google Patents

Info

Publication number
JPS6438172U
JPS6438172U JP13165387U JP13165387U JPS6438172U JP S6438172 U JPS6438172 U JP S6438172U JP 13165387 U JP13165387 U JP 13165387U JP 13165387 U JP13165387 U JP 13165387U JP S6438172 U JPS6438172 U JP S6438172U
Authority
JP
Japan
Prior art keywords
introduction hole
tank
heating
inert liquid
fluorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13165387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13165387U priority Critical patent/JPS6438172U/ja
Publication of JPS6438172U publication Critical patent/JPS6438172U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP13165387U 1987-08-31 1987-08-31 Pending JPS6438172U (sk)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13165387U JPS6438172U (sk) 1987-08-31 1987-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13165387U JPS6438172U (sk) 1987-08-31 1987-08-31

Publications (1)

Publication Number Publication Date
JPS6438172U true JPS6438172U (sk) 1989-03-07

Family

ID=31387921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13165387U Pending JPS6438172U (sk) 1987-08-31 1987-08-31

Country Status (1)

Country Link
JP (1) JPS6438172U (sk)

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