JPS6437834A - Device for manufacturing semiconductor device - Google Patents
Device for manufacturing semiconductor deviceInfo
- Publication number
- JPS6437834A JPS6437834A JP19462987A JP19462987A JPS6437834A JP S6437834 A JPS6437834 A JP S6437834A JP 19462987 A JP19462987 A JP 19462987A JP 19462987 A JP19462987 A JP 19462987A JP S6437834 A JPS6437834 A JP S6437834A
- Authority
- JP
- Japan
- Prior art keywords
- heat
- core tube
- insulating material
- opened
- holders
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent the change of temperature distribution in a core tube by composing the section of a heat-insulating material of a ring-shaped heat- insulating material, which can be opened and closed, and a holder covering the heat insulating material. CONSTITUTION:A cylindrical core tube 3 is installed into a cylindrical type heater 1, and heat-insulating material sections 2 covering both ends of the heater are mounted onto the core tube 3. The heat-insulating material sections 2 are constituted of ring-shaped half heat-insulating materials 5, which can be opened and closed to the left and the right, and holders 4 with fixing sections 7, which cover the materials 5, can be opened and closed by hinges 6 and have springs. Accordingly, since the holders 4 and the heat-insulating materials 5 can be opened and closes easily, the core tube 3 is exchanged easily, and the heat- insulating materials 5 are fast stuck and fastened to the core tube 3 by the holders 4, thus generating no clearance, then preventing the change of temperature distribution in the tube even when the core tube is exchanged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19462987A JPS6437834A (en) | 1987-08-03 | 1987-08-03 | Device for manufacturing semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19462987A JPS6437834A (en) | 1987-08-03 | 1987-08-03 | Device for manufacturing semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437834A true JPS6437834A (en) | 1989-02-08 |
Family
ID=16327694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19462987A Pending JPS6437834A (en) | 1987-08-03 | 1987-08-03 | Device for manufacturing semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437834A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02198134A (en) * | 1989-01-27 | 1990-08-06 | Mitsubishi Electric Corp | Apparatus for manufacturing semiconductor |
| DE102016104274B4 (en) | 2015-03-25 | 2021-12-16 | Toyota Jidosha Kabushiki Kaisha | JAM INFORMATION GENERATING DEVICE AND JAM INFORMATION GENERATING METHOD |
-
1987
- 1987-08-03 JP JP19462987A patent/JPS6437834A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02198134A (en) * | 1989-01-27 | 1990-08-06 | Mitsubishi Electric Corp | Apparatus for manufacturing semiconductor |
| DE102016104274B4 (en) | 2015-03-25 | 2021-12-16 | Toyota Jidosha Kabushiki Kaisha | JAM INFORMATION GENERATING DEVICE AND JAM INFORMATION GENERATING METHOD |
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