|
US7208413B2
(en)
|
2000-06-27 |
2007-04-24 |
Applied Materials, Inc. |
Formation of boride barrier layers using chemisorption techniques
|
|
US7501343B2
(en)
|
2000-06-27 |
2009-03-10 |
Applied Materials, Inc. |
Formation of boride barrier layers using chemisorption techniques
|
|
US7501344B2
(en)
|
2000-06-27 |
2009-03-10 |
Applied Materials, Inc. |
Formation of boride barrier layers using chemisorption techniques
|
|
US7235486B2
(en)
|
2000-06-28 |
2007-06-26 |
Applied Materials, Inc. |
Method for forming tungsten materials during vapor deposition processes
|
|
US7465666B2
(en)
|
2000-06-28 |
2008-12-16 |
Applied Materials, Inc. |
Method for forming tungsten materials during vapor deposition processes
|
|
US7846840B2
(en)
|
2000-06-28 |
2010-12-07 |
Applied Materials, Inc. |
Method for forming tungsten materials during vapor deposition processes
|
|
US7405158B2
(en)
|
2000-06-28 |
2008-07-29 |
Applied Materials, Inc. |
Methods for depositing tungsten layers employing atomic layer deposition techniques
|
|
US7033922B2
(en)
|
2000-06-28 |
2006-04-25 |
Applied Materials. Inc. |
Method and system for controlling the presence of fluorine in refractory metal layers
|
|
US6855368B1
(en)
|
2000-06-28 |
2005-02-15 |
Applied Materials, Inc. |
Method and system for controlling the presence of fluorine in refractory metal layers
|
|
US7115494B2
(en)
|
2000-06-28 |
2006-10-03 |
Applied Materials, Inc. |
Method and system for controlling the presence of fluorine in refractory metal layers
|
|
US7101795B1
(en)
|
2000-06-28 |
2006-09-05 |
Applied Materials, Inc. |
Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer
|
|
US6998579B2
(en)
|
2000-12-29 |
2006-02-14 |
Applied Materials, Inc. |
Chamber for uniform substrate heating
|
|
US7022948B2
(en)
|
2000-12-29 |
2006-04-04 |
Applied Materials, Inc. |
Chamber for uniform substrate heating
|
|
US7781326B2
(en)
|
2001-02-02 |
2010-08-24 |
Applied Materials, Inc. |
Formation of a tantalum-nitride layer
|
|
US6951804B2
(en)
|
2001-02-02 |
2005-10-04 |
Applied Materials, Inc. |
Formation of a tantalum-nitride layer
|
|
US9012334B2
(en)
|
2001-02-02 |
2015-04-21 |
Applied Materials, Inc. |
Formation of a tantalum-nitride layer
|
|
US7094680B2
(en)
|
2001-02-02 |
2006-08-22 |
Applied Materials, Inc. |
Formation of a tantalum-nitride layer
|
|
US9587310B2
(en)
|
2001-03-02 |
2017-03-07 |
Applied Materials, Inc. |
Lid assembly for a processing system to facilitate sequential deposition techniques
|
|
US7211144B2
(en)
|
2001-07-13 |
2007-05-01 |
Applied Materials, Inc. |
Pulsed nucleation deposition of tungsten layers
|
|
US10280509B2
(en)
|
2001-07-16 |
2019-05-07 |
Applied Materials, Inc. |
Lid assembly for a processing system to facilitate sequential deposition techniques
|
|
US6878206B2
(en)
|
2001-07-16 |
2005-04-12 |
Applied Materials, Inc. |
Lid assembly for a processing system to facilitate sequential deposition techniques
|
|
US7085616B2
(en)
|
2001-07-27 |
2006-08-01 |
Applied Materials, Inc. |
Atomic layer deposition apparatus
|
|
US7352048B2
(en)
|
2001-09-26 |
2008-04-01 |
Applied Materials, Inc. |
Integration of barrier layer and seed layer
|
|
US7494908B2
(en)
|
2001-09-26 |
2009-02-24 |
Applied Materials, Inc. |
Apparatus for integration of barrier layer and seed layer
|
|
US7049226B2
(en)
|
2001-09-26 |
2006-05-23 |
Applied Materials, Inc. |
Integration of ALD tantalum nitride for copper metallization
|
|
US6936906B2
(en)
|
2001-09-26 |
2005-08-30 |
Applied Materials, Inc. |
Integration of barrier layer and seed layer
|
|
US6911391B2
(en)
|
2002-01-26 |
2005-06-28 |
Applied Materials, Inc. |
Integration of titanium and titanium nitride layers
|
|
US7429516B2
(en)
|
2002-02-26 |
2008-09-30 |
Applied Materials, Inc. |
Tungsten nitride atomic layer deposition processes
|
|
US7115499B2
(en)
|
2002-02-26 |
2006-10-03 |
Applied Materials, Inc. |
Cyclical deposition of tungsten nitride for metal oxide gate electrode
|
|
US7439191B2
(en)
|
2002-04-05 |
2008-10-21 |
Applied Materials, Inc. |
Deposition of silicon layers for active matrix liquid crystal display (AMLCD) applications
|
|
US7262133B2
(en)
|
2003-01-07 |
2007-08-28 |
Applied Materials, Inc. |
Enhancement of copper line reliability using thin ALD tan film to cap the copper line
|
|
US7595263B2
(en)
|
2003-06-18 |
2009-09-29 |
Applied Materials, Inc. |
Atomic layer deposition of barrier materials
|