JPS6437644U - - Google Patents

Info

Publication number
JPS6437644U
JPS6437644U JP13128787U JP13128787U JPS6437644U JP S6437644 U JPS6437644 U JP S6437644U JP 13128787 U JP13128787 U JP 13128787U JP 13128787 U JP13128787 U JP 13128787U JP S6437644 U JPS6437644 U JP S6437644U
Authority
JP
Japan
Prior art keywords
valve
dust
vibration
amount
particle counter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13128787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13128787U priority Critical patent/JPS6437644U/ja
Publication of JPS6437644U publication Critical patent/JPS6437644U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
JP13128787U 1987-08-27 1987-08-27 Pending JPS6437644U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13128787U JPS6437644U (enrdf_load_stackoverflow) 1987-08-27 1987-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13128787U JPS6437644U (enrdf_load_stackoverflow) 1987-08-27 1987-08-27

Publications (1)

Publication Number Publication Date
JPS6437644U true JPS6437644U (enrdf_load_stackoverflow) 1989-03-07

Family

ID=31387210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13128787U Pending JPS6437644U (enrdf_load_stackoverflow) 1987-08-27 1987-08-27

Country Status (1)

Country Link
JP (1) JPS6437644U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103749A (ja) * 1989-09-19 1991-04-30 Tokyo Electron Ltd パーティクル計測装置
JPH03233343A (ja) * 1989-12-04 1991-10-17 Tokyo Electron Ltd パーティクル計測装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103749A (ja) * 1989-09-19 1991-04-30 Tokyo Electron Ltd パーティクル計測装置
JPH03233343A (ja) * 1989-12-04 1991-10-17 Tokyo Electron Ltd パーティクル計測装置

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