JPS6437644U - - Google Patents
Info
- Publication number
- JPS6437644U JPS6437644U JP13128787U JP13128787U JPS6437644U JP S6437644 U JPS6437644 U JP S6437644U JP 13128787 U JP13128787 U JP 13128787U JP 13128787 U JP13128787 U JP 13128787U JP S6437644 U JPS6437644 U JP S6437644U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- dust
- vibration
- amount
- particle counter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 2
- 239000000428 dust Substances 0.000 claims 2
- 238000005070 sampling Methods 0.000 claims 1
- 230000001629 suppression Effects 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13128787U JPS6437644U (cs) | 1987-08-27 | 1987-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13128787U JPS6437644U (cs) | 1987-08-27 | 1987-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437644U true JPS6437644U (cs) | 1989-03-07 |
Family
ID=31387210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13128787U Pending JPS6437644U (cs) | 1987-08-27 | 1987-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437644U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03103749A (ja) * | 1989-09-19 | 1991-04-30 | Tokyo Electron Ltd | パーティクル計測装置 |
| JPH03233343A (ja) * | 1989-12-04 | 1991-10-17 | Tokyo Electron Ltd | パーティクル計測装置 |
-
1987
- 1987-08-27 JP JP13128787U patent/JPS6437644U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03103749A (ja) * | 1989-09-19 | 1991-04-30 | Tokyo Electron Ltd | パーティクル計測装置 |
| JPH03233343A (ja) * | 1989-12-04 | 1991-10-17 | Tokyo Electron Ltd | パーティクル計測装置 |
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