JPS6437032U - - Google Patents
Info
- Publication number
- JPS6437032U JPS6437032U JP13361987U JP13361987U JPS6437032U JP S6437032 U JPS6437032 U JP S6437032U JP 13361987 U JP13361987 U JP 13361987U JP 13361987 U JP13361987 U JP 13361987U JP S6437032 U JPS6437032 U JP S6437032U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- tube
- heat
- covered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13361987U JPS6437032U (id) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13361987U JPS6437032U (id) | 1987-08-31 | 1987-08-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6437032U true JPS6437032U (id) | 1989-03-06 |
Family
ID=31391646
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13361987U Pending JPS6437032U (id) | 1987-08-31 | 1987-08-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6437032U (id) |
-
1987
- 1987-08-31 JP JP13361987U patent/JPS6437032U/ja active Pending