JPS6437031U - - Google Patents
Info
- Publication number
- JPS6437031U JPS6437031U JP13361887U JP13361887U JPS6437031U JP S6437031 U JPS6437031 U JP S6437031U JP 13361887 U JP13361887 U JP 13361887U JP 13361887 U JP13361887 U JP 13361887U JP S6437031 U JPS6437031 U JP S6437031U
- Authority
- JP
- Japan
- Prior art keywords
- heat ray
- provided outside
- heat
- core tube
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13361887U JPS6437031U (en:Method) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13361887U JPS6437031U (en:Method) | 1987-08-31 | 1987-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437031U true JPS6437031U (en:Method) | 1989-03-06 |
Family
ID=31391644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13361887U Pending JPS6437031U (en:Method) | 1987-08-31 | 1987-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437031U (en:Method) |
-
1987
- 1987-08-31 JP JP13361887U patent/JPS6437031U/ja active Pending