JPS6436032U - - Google Patents

Info

Publication number
JPS6436032U
JPS6436032U JP13061687U JP13061687U JPS6436032U JP S6436032 U JPS6436032 U JP S6436032U JP 13061687 U JP13061687 U JP 13061687U JP 13061687 U JP13061687 U JP 13061687U JP S6436032 U JPS6436032 U JP S6436032U
Authority
JP
Japan
Prior art keywords
plasma reaction
mechanism section
trap
synthesis apparatus
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13061687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13061687U priority Critical patent/JPS6436032U/ja
Publication of JPS6436032U publication Critical patent/JPS6436032U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP13061687U 1987-08-26 1987-08-26 Pending JPS6436032U (lt)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13061687U JPS6436032U (lt) 1987-08-26 1987-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13061687U JPS6436032U (lt) 1987-08-26 1987-08-26

Publications (1)

Publication Number Publication Date
JPS6436032U true JPS6436032U (lt) 1989-03-06

Family

ID=31385946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13061687U Pending JPS6436032U (lt) 1987-08-26 1987-08-26

Country Status (1)

Country Link
JP (1) JPS6436032U (lt)

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