JPS6435777U - - Google Patents
Info
- Publication number
- JPS6435777U JPS6435777U JP12950187U JP12950187U JPS6435777U JP S6435777 U JPS6435777 U JP S6435777U JP 12950187 U JP12950187 U JP 12950187U JP 12950187 U JP12950187 U JP 12950187U JP S6435777 U JPS6435777 U JP S6435777U
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- optical system
- transparent material
- exposed surface
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 2
- 239000012780 transparent material Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
Description
第２図は従来のものの正面断面図、第１図は本
考案の実施例を示す正面断面図である。 １：光源、２：光学系、３：露光面、４：筐体
、６：隔壁。
考案の実施例を示す正面断面図である。 １：光源、２：光学系、３：露光面、４：筐体
、６：隔壁。
Claims (1)
- 光源からの放射光を光学系を介して平行光に変
換し、透明体よりなる露光面に照射するようにし
た露光桟において、前記露光面と光学系の間に透
明体よりなる隔壁を介在させて露光面との間に小
体積の室を形成し、その室を空冷装置と連通させ
たことを特徴とする露光桟。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987129501U JPH0438541Y2 (ja) | 1987-08-27 | 1987-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987129501U JPH0438541Y2 (ja) | 1987-08-27 | 1987-08-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6435777U true JPS6435777U (ja) | 1989-03-03 |
| JPH0438541Y2 JPH0438541Y2 (ja) | 1992-09-09 |
Family
ID=31383833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987129501U Expired JPH0438541Y2 (ja) | 1987-08-27 | 1987-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438541Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04226828A (ja) * | 1990-05-14 | 1992-08-17 | Iscar Ltd | フライス切削インサート |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS493580U (ja) * | 1972-04-11 | 1974-01-12 | ||
| JPS4935801U (ja) * | 1972-06-29 | 1974-03-29 |
-
1987
- 1987-08-27 JP JP1987129501U patent/JPH0438541Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS493580U (ja) * | 1972-04-11 | 1974-01-12 | ||
| JPS4935801U (ja) * | 1972-06-29 | 1974-03-29 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04226828A (ja) * | 1990-05-14 | 1992-08-17 | Iscar Ltd | フライス切削インサート |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0438541Y2 (ja) | 1992-09-09 |