JPS6435776U - - Google Patents

Info

Publication number
JPS6435776U
JPS6435776U JP12950087U JP12950087U JPS6435776U JP S6435776 U JPS6435776 U JP S6435776U JP 12950087 U JP12950087 U JP 12950087U JP 12950087 U JP12950087 U JP 12950087U JP S6435776 U JPS6435776 U JP S6435776U
Authority
JP
Japan
Prior art keywords
exposure
optical system
transparent material
exposed surface
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12950087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12950087U priority Critical patent/JPS6435776U/ja
Publication of JPS6435776U publication Critical patent/JPS6435776U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
JP12950087U 1987-08-27 1987-08-27 Pending JPS6435776U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12950087U JPS6435776U (US07709020-20100504-C00041.png) 1987-08-27 1987-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12950087U JPS6435776U (US07709020-20100504-C00041.png) 1987-08-27 1987-08-27

Publications (1)

Publication Number Publication Date
JPS6435776U true JPS6435776U (US07709020-20100504-C00041.png) 1989-03-03

Family

ID=31383831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12950087U Pending JPS6435776U (US07709020-20100504-C00041.png) 1987-08-27 1987-08-27

Country Status (1)

Country Link
JP (1) JPS6435776U (US07709020-20100504-C00041.png)

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