JPS6435228U - - Google Patents
Info
- Publication number
- JPS6435228U JPS6435228U JP13027187U JP13027187U JPS6435228U JP S6435228 U JPS6435228 U JP S6435228U JP 13027187 U JP13027187 U JP 13027187U JP 13027187 U JP13027187 U JP 13027187U JP S6435228 U JPS6435228 U JP S6435228U
- Authority
- JP
- Japan
- Prior art keywords
- bifurcated
- radial direction
- outer end
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Braking Arrangements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13027187U JPS6435228U (fr) | 1987-08-27 | 1987-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13027187U JPS6435228U (fr) | 1987-08-27 | 1987-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6435228U true JPS6435228U (fr) | 1989-03-03 |
Family
ID=31385286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13027187U Pending JPS6435228U (fr) | 1987-08-27 | 1987-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6435228U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7604401B2 (en) | 2004-07-01 | 2009-10-20 | Ul Vac, Inc. | Substrate temperature measurement apparatus and processing apparatus |
-
1987
- 1987-08-27 JP JP13027187U patent/JPS6435228U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7604401B2 (en) | 2004-07-01 | 2009-10-20 | Ul Vac, Inc. | Substrate temperature measurement apparatus and processing apparatus |