JPS6434752U - - Google Patents
Info
- Publication number
- JPS6434752U JPS6434752U JP12850387U JP12850387U JPS6434752U JP S6434752 U JPS6434752 U JP S6434752U JP 12850387 U JP12850387 U JP 12850387U JP 12850387 U JP12850387 U JP 12850387U JP S6434752 U JPS6434752 U JP S6434752U
- Authority
- JP
- Japan
- Prior art keywords
- ion implantation
- ions
- wafer
- rotating disk
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 238000005468 ion implantation Methods 0.000 claims description 5
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 5
- 230000001133 acceleration Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 238000002513 implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12850387U JPS6434752U (en, 2012) | 1987-08-26 | 1987-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12850387U JPS6434752U (en, 2012) | 1987-08-26 | 1987-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6434752U true JPS6434752U (en, 2012) | 1989-03-02 |
Family
ID=31381901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12850387U Pending JPS6434752U (en, 2012) | 1987-08-26 | 1987-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6434752U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0433651U (en, 2012) * | 1990-07-11 | 1992-03-19 |
-
1987
- 1987-08-26 JP JP12850387U patent/JPS6434752U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0433651U (en, 2012) * | 1990-07-11 | 1992-03-19 |
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