JPS6433738U - - Google Patents
Info
- Publication number
- JPS6433738U JPS6433738U JP12888387U JP12888387U JPS6433738U JP S6433738 U JPS6433738 U JP S6433738U JP 12888387 U JP12888387 U JP 12888387U JP 12888387 U JP12888387 U JP 12888387U JP S6433738 U JPS6433738 U JP S6433738U
- Authority
- JP
- Japan
- Prior art keywords
- barrel
- susceptor
- wafer
- vapor phase
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12888387U JPS6433738U (cs) | 1987-08-25 | 1987-08-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12888387U JPS6433738U (cs) | 1987-08-25 | 1987-08-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6433738U true JPS6433738U (cs) | 1989-03-02 |
Family
ID=31382636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12888387U Pending JPS6433738U (cs) | 1987-08-25 | 1987-08-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433738U (cs) |
-
1987
- 1987-08-25 JP JP12888387U patent/JPS6433738U/ja active Pending