JPS6430842U - - Google Patents
Info
- Publication number
- JPS6430842U JPS6430842U JP1987125701U JP12570187U JPS6430842U JP S6430842 U JPS6430842 U JP S6430842U JP 1987125701 U JP1987125701 U JP 1987125701U JP 12570187 U JP12570187 U JP 12570187U JP S6430842 U JPS6430842 U JP S6430842U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- susceptor
- tip
- rod
- shaped body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987125701U JPS6430842U (enExample) | 1987-08-20 | 1987-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987125701U JPS6430842U (enExample) | 1987-08-20 | 1987-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430842U true JPS6430842U (enExample) | 1989-02-27 |
Family
ID=31376537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987125701U Pending JPS6430842U (enExample) | 1987-08-20 | 1987-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430842U (enExample) |
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1987
- 1987-08-20 JP JP1987125701U patent/JPS6430842U/ja active Pending