JPS6430840U - - Google Patents
Info
- Publication number
- JPS6430840U JPS6430840U JP12615887U JP12615887U JPS6430840U JP S6430840 U JPS6430840 U JP S6430840U JP 12615887 U JP12615887 U JP 12615887U JP 12615887 U JP12615887 U JP 12615887U JP S6430840 U JPS6430840 U JP S6430840U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer storage
- side plates
- grooves
- locking part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000007373 indentation Methods 0.000 claims 1
Landscapes
- Weting (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12615887U JPS6430840U (enExample) | 1987-08-18 | 1987-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12615887U JPS6430840U (enExample) | 1987-08-18 | 1987-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430840U true JPS6430840U (enExample) | 1989-02-27 |
Family
ID=31377418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12615887U Pending JPS6430840U (enExample) | 1987-08-18 | 1987-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430840U (enExample) |
-
1987
- 1987-08-18 JP JP12615887U patent/JPS6430840U/ja active Pending