JPS6430828U - - Google Patents
Info
- Publication number
- JPS6430828U JPS6430828U JP12713787U JP12713787U JPS6430828U JP S6430828 U JPS6430828 U JP S6430828U JP 12713787 U JP12713787 U JP 12713787U JP 12713787 U JP12713787 U JP 12713787U JP S6430828 U JPS6430828 U JP S6430828U
- Authority
- JP
- Japan
- Prior art keywords
- processed
- pressing member
- processing apparatus
- exposure processing
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12713787U JPS6430828U (no) | 1987-08-20 | 1987-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12713787U JPS6430828U (no) | 1987-08-20 | 1987-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430828U true JPS6430828U (no) | 1989-02-27 |
Family
ID=31379289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12713787U Pending JPS6430828U (no) | 1987-08-20 | 1987-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430828U (no) |
-
1987
- 1987-08-20 JP JP12713787U patent/JPS6430828U/ja active Pending