JPS6430824U - - Google Patents

Info

Publication number

JPS6430824U

JPS6430824U JP12686587U JP12686587U JPS6430824U JP S6430824 U JPS6430824 U JP S6430824U JP 12686587 U JP12686587 U JP 12686587U JP 12686587 U JP12686587 U JP 12686587U JP S6430824 U JPS6430824 U JP S6430824U

Authority

JP

Japan

Prior art keywords

wafer

auxiliary plate

susceptor

orientation flat

sic

Prior art date

1987-08-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
• 229910052799 carbon Inorganic materials 0.000 claims 1
• 239000000463 material Substances 0.000 claims 1
• 239000010453 quartz Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (2)