JPS6430823U - - Google Patents
Info
- Publication number
- JPS6430823U JPS6430823U JP12570287U JP12570287U JPS6430823U JP S6430823 U JPS6430823 U JP S6430823U JP 12570287 U JP12570287 U JP 12570287U JP 12570287 U JP12570287 U JP 12570287U JP S6430823 U JPS6430823 U JP S6430823U
- Authority
- JP
- Japan
- Prior art keywords
- inclined surface
- support shaft
- susceptor
- shaft
- drive shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 2
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12570287U JPS6430823U (xx) | 1987-08-20 | 1987-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12570287U JPS6430823U (xx) | 1987-08-20 | 1987-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430823U true JPS6430823U (xx) | 1989-02-27 |
Family
ID=31376539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12570287U Pending JPS6430823U (xx) | 1987-08-20 | 1987-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430823U (xx) |
-
1987
- 1987-08-20 JP JP12570287U patent/JPS6430823U/ja active Pending