JPS6430466A - Two-dimensional driving device - Google Patents

Abstract

PURPOSE:To improve the precision of directional stability, by using a rotary body having the directionality of a cylindrical roller or the like as the rotary body, and by stabilizing the moving direction. CONSTITUTION:At a movable table 1, three cylindrical rollers 2-4 are rotatably fitted by bearings 2'-4' integrated with the movable table 1, in the direction of the center of gravity, and are manufactured movably in the three directions on a plane 5. At the respective apexes of the equilateral-triangular movable table 1, driving sources 6-8 are fitted, and they are extended in the longitudinal directions (directions of arrow heads), and by pushing the plane 5 with them, with its reaction, the movable table 1 is moved. In this case, when the driving sources 7, 8 are driven, then they come in contact with the plane 5, and the rotating roller 2 is permitted to have directionality. As a result, even if fine adjustment so that the scales of driving vectors generated when the driving sources 7, 8 are driven may be perfectly equal to each other is not performed, the moving direction is to be stably determined in the rotational direction of the rotating roller 2, and even if its driving control is simplified, the driving in the desired direction can be performed.