JPS6429837U - - Google Patents

Info

Publication number

JPS6429837U

JPS6429837U JP12420187U JP12420187U JPS6429837U JP S6429837 U JPS6429837 U JP S6429837U JP 12420187 U JP12420187 U JP 12420187U JP 12420187 U JP12420187 U JP 12420187U JP S6429837 U JPS6429837 U JP S6429837U

Authority

JP

Japan

Prior art keywords

opening

contact hole

diffusion region

contact

insulating film

Prior art date

1987-08-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000009792 diffusion process Methods 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000011229 interlayer Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000004020 conductor Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• 239000010410 layer Substances 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 230000015572 biosynthetic process Effects 0.000 description 1

Cited By (1)