JPS6429837U - - Google Patents
Info
- Publication number
- JPS6429837U JPS6429837U JP12420187U JP12420187U JPS6429837U JP S6429837 U JPS6429837 U JP S6429837U JP 12420187 U JP12420187 U JP 12420187U JP 12420187 U JP12420187 U JP 12420187U JP S6429837 U JPS6429837 U JP S6429837U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- contact hole
- diffusion region
- contact
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000011229 interlayer Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12420187U JPS6429837U (US07321065-20080122-C00160.png) | 1987-08-13 | 1987-08-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12420187U JPS6429837U (US07321065-20080122-C00160.png) | 1987-08-13 | 1987-08-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6429837U true JPS6429837U (US07321065-20080122-C00160.png) | 1989-02-22 |
Family
ID=31373725
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12420187U Pending JPS6429837U (US07321065-20080122-C00160.png) | 1987-08-13 | 1987-08-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6429837U (US07321065-20080122-C00160.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7276323B2 (en) | 1998-09-23 | 2007-10-02 | E. I. Du Pont De Nemours And Company | Photoresists, polymers and processes for microlithography |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60148147A (ja) * | 1984-01-13 | 1985-08-05 | Nec Corp | 半導体装置 |
JPS63219160A (ja) * | 1987-03-06 | 1988-09-12 | Nec Corp | 半導体素子及びその製造方法 |
-
1987
- 1987-08-13 JP JP12420187U patent/JPS6429837U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60148147A (ja) * | 1984-01-13 | 1985-08-05 | Nec Corp | 半導体装置 |
JPS63219160A (ja) * | 1987-03-06 | 1988-09-12 | Nec Corp | 半導体素子及びその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7276323B2 (en) | 1998-09-23 | 2007-10-02 | E. I. Du Pont De Nemours And Company | Photoresists, polymers and processes for microlithography |