JPS6429831U - - Google Patents
Info
- Publication number
- JPS6429831U JPS6429831U JP12504087U JP12504087U JPS6429831U JP S6429831 U JPS6429831 U JP S6429831U JP 12504087 U JP12504087 U JP 12504087U JP 12504087 U JP12504087 U JP 12504087U JP S6429831 U JPS6429831 U JP S6429831U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- slide guide
- probe
- card
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 11
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12504087U JPS6429831U (cs) | 1987-08-17 | 1987-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12504087U JPS6429831U (cs) | 1987-08-17 | 1987-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6429831U true JPS6429831U (cs) | 1989-02-22 |
Family
ID=31375291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12504087U Pending JPS6429831U (cs) | 1987-08-17 | 1987-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6429831U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04355942A (ja) * | 1991-08-13 | 1992-12-09 | Tokyo Electron Ltd | ウエハプローブ方法 |
-
1987
- 1987-08-17 JP JP12504087U patent/JPS6429831U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04355942A (ja) * | 1991-08-13 | 1992-12-09 | Tokyo Electron Ltd | ウエハプローブ方法 |