JPS6429831U - - Google Patents

Info

Publication number
JPS6429831U
JPS6429831U JP12504087U JP12504087U JPS6429831U JP S6429831 U JPS6429831 U JP S6429831U JP 12504087 U JP12504087 U JP 12504087U JP 12504087 U JP12504087 U JP 12504087U JP S6429831 U JPS6429831 U JP S6429831U
Authority
JP
Japan
Prior art keywords
probe card
slide guide
probe
card
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12504087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12504087U priority Critical patent/JPS6429831U/ja
Publication of JPS6429831U publication Critical patent/JPS6429831U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12504087U 1987-08-17 1987-08-17 Pending JPS6429831U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12504087U JPS6429831U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-17 1987-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12504087U JPS6429831U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-17 1987-08-17

Publications (1)

Publication Number Publication Date
JPS6429831U true JPS6429831U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-02-22

Family

ID=31375291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12504087U Pending JPS6429831U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-17 1987-08-17

Country Status (1)

Country Link
JP (1) JPS6429831U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04355942A (ja) * 1991-08-13 1992-12-09 Tokyo Electron Ltd ウエハプローブ方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04355942A (ja) * 1991-08-13 1992-12-09 Tokyo Electron Ltd ウエハプローブ方法

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