JPS6429825U - - Google Patents

Info

Publication number

JPS6429825U

JPS6429825U JP12419987U JP12419987U JPS6429825U JP S6429825 U JPS6429825 U JP S6429825U JP 12419987 U JP12419987 U JP 12419987U JP 12419987 U JP12419987 U JP 12419987U JP S6429825 U JPS6429825 U JP S6429825U

Authority

JP

Japan

Prior art keywords

semiconductor device

protective film

wiring layer

insulating film

layer

Prior art date

1987-08-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 3
• 230000001681 protective effect Effects 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 5
• 238000004519 manufacturing process Methods 0.000 description 2
• 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1