JPS6429705A - Vibration type angular velocity detecting device - Google Patents

Vibration type angular velocity detecting device

Info

Publication number
JPS6429705A
JPS6429705A JP18374187A JP18374187A JPS6429705A JP S6429705 A JPS6429705 A JP S6429705A JP 18374187 A JP18374187 A JP 18374187A JP 18374187 A JP18374187 A JP 18374187A JP S6429705 A JPS6429705 A JP S6429705A
Authority
JP
Japan
Prior art keywords
container
case
getter
angular velocity
vibration type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18374187A
Other languages
Japanese (ja)
Inventor
Takahiro Oikawa
Junsuke Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yazaki Corp
Original Assignee
Yazaki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yazaki Corp filed Critical Yazaki Corp
Priority to JP18374187A priority Critical patent/JPS6429705A/en
Priority to GB8816715A priority patent/GB2208318B/en
Priority to DE3824990A priority patent/DE3824990A1/en
Priority to US07/222,751 priority patent/US4898031A/en
Publication of JPS6429705A publication Critical patent/JPS6429705A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a miniature device having a stable detection characteristic by a simple structure, by closing up tightly a vibration type angular velocity detector in a vacuum container, and eliminating a temperature change and a humidity change of the open air, and also, a viscous resistance. CONSTITUTION:To a case 2 of a vibration type angular velocity detector 10, a sub-container 4 is connected through a connecting tube 2a. In this container 4, a getter 5 is wired, and a terminal 6 for bringing the getter 5 to an electric conduction is drawn out to the outside of the container 4. Also, the inside of the container 4, and the case 2 is sucked by a vacuum pump, etc., from a suction pipe 4a formed in the container 4, and set to a vacuum state to some extent. Subsequently, the getter 5 is conducted electrically through the terminal 6 and the getter 5 is burned, and the inside of the container 4 and the case 2 is set to a high vacuum. Thereafter, the connecting tube 2a is cut and sealed, and the case 2 is closed up tightly. In such a way, since the inside of the case 2 becomes a high vacuum state, the detector 10 in the case 2 is not influenced by a temperature change and a humidity change of the open air without using a constant temperature oven, and also, a viscous resistance of air is reduced.
JP18374187A 1987-07-24 1987-07-24 Vibration type angular velocity detecting device Pending JPS6429705A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP18374187A JPS6429705A (en) 1987-07-24 1987-07-24 Vibration type angular velocity detecting device
GB8816715A GB2208318B (en) 1987-07-24 1988-07-14 Vibrational angular velocity sensor
DE3824990A DE3824990A1 (en) 1987-07-24 1988-07-22 VIBRATION ANGLE SPEED SENSOR
US07/222,751 US4898031A (en) 1987-07-24 1988-07-22 Vibrational angular velocity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18374187A JPS6429705A (en) 1987-07-24 1987-07-24 Vibration type angular velocity detecting device

Publications (1)

Publication Number Publication Date
JPS6429705A true JPS6429705A (en) 1989-01-31

Family

ID=16141164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18374187A Pending JPS6429705A (en) 1987-07-24 1987-07-24 Vibration type angular velocity detecting device

Country Status (1)

Country Link
JP (1) JPS6429705A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5131273A (en) * 1989-07-07 1992-07-21 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor and a sensor apparatus incorporating the same
DE112016002341B4 (en) 2015-08-12 2021-12-23 Hohai University Arrangement of several tubular piles arranged next to one another with a heat transfer pipe arrangement embedded in at least one prefabricated tubular pile and a pump unit

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293668A (en) * 1985-10-21 1987-04-30 Hitachi Ltd Angular speed/acceleration detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293668A (en) * 1985-10-21 1987-04-30 Hitachi Ltd Angular speed/acceleration detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5131273A (en) * 1989-07-07 1992-07-21 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor and a sensor apparatus incorporating the same
DE112016002341B4 (en) 2015-08-12 2021-12-23 Hohai University Arrangement of several tubular piles arranged next to one another with a heat transfer pipe arrangement embedded in at least one prefabricated tubular pile and a pump unit

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