JPS6428933U - - Google Patents
Info
- Publication number
- JPS6428933U JPS6428933U JP1987123588U JP12358887U JPS6428933U JP S6428933 U JPS6428933 U JP S6428933U JP 1987123588 U JP1987123588 U JP 1987123588U JP 12358887 U JP12358887 U JP 12358887U JP S6428933 U JPS6428933 U JP S6428933U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- electronic dehumidifier
- float switch
- bottom plate
- electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000001816 cooling Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Drying Of Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987123588U JPS6428933U (en, 2012) | 1987-08-12 | 1987-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987123588U JPS6428933U (en, 2012) | 1987-08-12 | 1987-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6428933U true JPS6428933U (en, 2012) | 1989-02-21 |
Family
ID=31372572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987123588U Pending JPS6428933U (en, 2012) | 1987-08-12 | 1987-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6428933U (en, 2012) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02229520A (ja) * | 1989-03-03 | 1990-09-12 | Mitsubishi Electric Corp | 電子乾燥装置 |
| JPH02133417U (en, 2012) * | 1989-04-05 | 1990-11-06 | ||
| US7105463B2 (en) | 2000-09-15 | 2006-09-12 | Applied Materials, Inc. | Load lock chamber having two dual slot regions |
| US7207766B2 (en) | 2003-10-20 | 2007-04-24 | Applied Materials, Inc. | Load lock chamber for large area substrate processing system |
| US7497414B2 (en) | 2004-06-14 | 2009-03-03 | Applied Materials, Inc. | Curved slit valve door with flexible coupling |
| US7641434B2 (en) | 1999-12-15 | 2010-01-05 | Applied Materials, Inc. | Dual substrate loadlock process equipment |
-
1987
- 1987-08-12 JP JP1987123588U patent/JPS6428933U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02229520A (ja) * | 1989-03-03 | 1990-09-12 | Mitsubishi Electric Corp | 電子乾燥装置 |
| JPH02133417U (en, 2012) * | 1989-04-05 | 1990-11-06 | ||
| US7641434B2 (en) | 1999-12-15 | 2010-01-05 | Applied Materials, Inc. | Dual substrate loadlock process equipment |
| US7105463B2 (en) | 2000-09-15 | 2006-09-12 | Applied Materials, Inc. | Load lock chamber having two dual slot regions |
| US7207766B2 (en) | 2003-10-20 | 2007-04-24 | Applied Materials, Inc. | Load lock chamber for large area substrate processing system |
| US7497414B2 (en) | 2004-06-14 | 2009-03-03 | Applied Materials, Inc. | Curved slit valve door with flexible coupling |
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