JPS6428819A - Method and device for pattern replication - Google Patents
Method and device for pattern replicationInfo
- Publication number
- JPS6428819A JPS6428819A JP62183300A JP18330087A JPS6428819A JP S6428819 A JPS6428819 A JP S6428819A JP 62183300 A JP62183300 A JP 62183300A JP 18330087 A JP18330087 A JP 18330087A JP S6428819 A JPS6428819 A JP S6428819A
- Authority
- JP
- Japan
- Prior art keywords
- transferred
- negative
- alignment
- light
- alignment mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To enable relative alignment of an element to be transferred to be made with a negative by a method wherein the rear side of the element to be transferred is irradiated with an alignment light to detect an alignment mark made on the element to be transferred. CONSTITUTION:An alignment light source 8b is lighted; the alignment light is divided into two parts by a half mirror 8C; one light irradiates the bottom surface of a negative 4; while the other light irradiates the rear side of an element 2 to be transferred. An X-Y table 1 and a negative mounting base 3 are relatively moved on a horizontal surface so that an alignment mark M made on the element to be transferred and another alignment mark made on the negative 4 may be aligned with a photodetector 8g. Through these procedures, the specified position of the element 2 to be transferred mounted on the table 1 can be precisely aligned with the negative 4 mounted on the base 3.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62183300A JPS6428819A (en) | 1987-07-24 | 1987-07-24 | Method and device for pattern replication |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62183300A JPS6428819A (en) | 1987-07-24 | 1987-07-24 | Method and device for pattern replication |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6428819A true JPS6428819A (en) | 1989-01-31 |
Family
ID=16133257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62183300A Pending JPS6428819A (en) | 1987-07-24 | 1987-07-24 | Method and device for pattern replication |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6428819A (en) |
-
1987
- 1987-07-24 JP JP62183300A patent/JPS6428819A/en active Pending
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