JPS6427637U - - Google Patents
Info
- Publication number
- JPS6427637U JPS6427637U JP12144487U JP12144487U JPS6427637U JP S6427637 U JPS6427637 U JP S6427637U JP 12144487 U JP12144487 U JP 12144487U JP 12144487 U JP12144487 U JP 12144487U JP S6427637 U JPS6427637 U JP S6427637U
- Authority
- JP
- Japan
- Prior art keywords
- light
- sealed container
- image sensor
- beam splitter
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12144487U JPH0613445Y2 (ja) | 1987-08-10 | 1987-08-10 | 密封容器の真空度検査装置 |
| US07/171,083 US4850696A (en) | 1987-03-27 | 1988-03-21 | Vacuum degree inspecting device for sealed up vessel |
| DE8888302503T DE3872906T2 (de) | 1987-03-27 | 1988-03-22 | Einrichtung zum ueberpruefen der groesse des vakuums in einem geschlossenen behaelter. |
| EP88302503A EP0284347B1 (en) | 1987-03-27 | 1988-03-22 | A device for inspecting the degree of vacuum in a sealed vessel |
| AU13782/88A AU606927B2 (en) | 1987-03-27 | 1988-03-28 | Vacuum degree inspecting device for sealed up vessel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12144487U JPH0613445Y2 (ja) | 1987-08-10 | 1987-08-10 | 密封容器の真空度検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6427637U true JPS6427637U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-17 |
| JPH0613445Y2 JPH0613445Y2 (ja) | 1994-04-06 |
Family
ID=31368454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12144487U Expired - Lifetime JPH0613445Y2 (ja) | 1987-03-27 | 1987-08-10 | 密封容器の真空度検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0613445Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1987
- 1987-08-10 JP JP12144487U patent/JPH0613445Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0613445Y2 (ja) | 1994-04-06 |