JPS6427636U - - Google Patents

Info

Publication number
JPS6427636U
JPS6427636U JP12268187U JP12268187U JPS6427636U JP S6427636 U JPS6427636 U JP S6427636U JP 12268187 U JP12268187 U JP 12268187U JP 12268187 U JP12268187 U JP 12268187U JP S6427636 U JPS6427636 U JP S6427636U
Authority
JP
Japan
Prior art keywords
substrate
sensor chip
square
measurement pressure
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12268187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12268187U priority Critical patent/JPS6427636U/ja
Publication of JPS6427636U publication Critical patent/JPS6427636U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP12268187U 1987-08-11 1987-08-11 Pending JPS6427636U (US06582424-20030624-M00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12268187U JPS6427636U (US06582424-20030624-M00016.png) 1987-08-11 1987-08-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12268187U JPS6427636U (US06582424-20030624-M00016.png) 1987-08-11 1987-08-11

Publications (1)

Publication Number Publication Date
JPS6427636U true JPS6427636U (US06582424-20030624-M00016.png) 1989-02-17

Family

ID=31370837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12268187U Pending JPS6427636U (US06582424-20030624-M00016.png) 1987-08-11 1987-08-11

Country Status (1)

Country Link
JP (1) JPS6427636U (US06582424-20030624-M00016.png)

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