JPS6426871U - - Google Patents
Info
- Publication number
- JPS6426871U JPS6426871U JP12222187U JP12222187U JPS6426871U JP S6426871 U JPS6426871 U JP S6426871U JP 12222187 U JP12222187 U JP 12222187U JP 12222187 U JP12222187 U JP 12222187U JP S6426871 U JPS6426871 U JP S6426871U
- Authority
- JP
- Japan
- Prior art keywords
- gas flow
- gas
- laser
- intermediate region
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Lasers (AREA)
Description
第１図ａはこの考案の一実施例によるガスレー
ザ装置を示す縦断面構成図、第１図ｂは第１図ａ
のＢ―Ｂ線での横断面図、並びに第２図ａ，ｂは
各各従来のガスレーザ装置を示す縦断面構成図及
び横断面構成図である。
１１ａ，１１ｂ，１２ａ，１２ｂ……電極、２
ａ，２ｂ……放電部、６１ａ，６１ｂ，６２……
レーザガス、８……全反射鏡、９……部分反射鏡
、１０……レーザ光、１３，１４……ガスガイド
、１３１，１３２……孔、１５……中間領域、１
６，１７……ミラー。なお、図中、同一符号は同
一又は相当部分を示す。
FIG. 1a is a vertical cross-sectional configuration diagram showing a gas laser device according to an embodiment of this invention, and FIG. 1b is a diagram of FIG. 1a.
FIG. 2A and FIG. 2B are a vertical cross-sectional configuration diagram and a cross-sectional configuration diagram showing each conventional gas laser device. 11a, 11b, 12a, 12b... electrode, 2
a, 2b...discharge section, 61a, 61b, 62...
Laser gas, 8... Total reflection mirror, 9... Partial reflection mirror, 10... Laser light, 13, 14... Gas guide, 131, 132... Hole, 15... Intermediate region, 1
6,17...mirror. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
電極、これら対向する電極間に形成される２つの
放電部及びこれら放電部の中間領域により光路が
Ｎ型をなす光共振器、上記各放電部にレーザガス
を互いにガス流方向が逆になるように流す第１ガ
ス流路、並びに上記放電部以外を通り、上記中間
領域に形成される光路にレーザガスを流す第２ガ
ス流路を備えたガスレーザ装置。 Two pairs of opposing electrodes arranged in parallel in the same plane, two discharge portions formed between these opposing electrodes, and an optical resonator in which an optical path forms an N-shape due to an intermediate region between these discharge portions, each of the above. A first gas flow path through which the laser gas flows through the discharge portion so that the gas flow directions are opposite to each other, and a second gas flow path through which the laser gas flows through an optical path formed in the intermediate region through a portion other than the discharge portion. Gas laser equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12222187U JPH0639469Y2 (en) | 1987-08-10 | 1987-08-10 | Gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12222187U JPH0639469Y2 (en) | 1987-08-10 | 1987-08-10 | Gas laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6426871U true JPS6426871U (en) | 1989-02-15 |
| JPH0639469Y2 JPH0639469Y2 (en) | 1994-10-12 |
Family
ID=31369946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12222187U Expired - Lifetime JPH0639469Y2 (en) | 1987-08-10 | 1987-08-10 | Gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0639469Y2 (en) |
-
1987
- 1987-08-10 JP JP12222187U patent/JPH0639469Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0639469Y2 (en) | 1994-10-12 |
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