JPS6426842U - - Google Patents
Info
- Publication number
- JPS6426842U JPS6426842U JP12275087U JP12275087U JPS6426842U JP S6426842 U JPS6426842 U JP S6426842U JP 12275087 U JP12275087 U JP 12275087U JP 12275087 U JP12275087 U JP 12275087U JP S6426842 U JPS6426842 U JP S6426842U
- Authority
- JP
- Japan
- Prior art keywords
- carrier body
- fixing
- carrier
- groove
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims description 9
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12275087U JPS6426842U (es) | 1987-08-10 | 1987-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12275087U JPS6426842U (es) | 1987-08-10 | 1987-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426842U true JPS6426842U (es) | 1989-02-15 |
Family
ID=31370971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12275087U Pending JPS6426842U (es) | 1987-08-10 | 1987-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426842U (es) |
-
1987
- 1987-08-10 JP JP12275087U patent/JPS6426842U/ja active Pending