JPS6426832U - - Google Patents
Info
- Publication number
- JPS6426832U JPS6426832U JP12125987U JP12125987U JPS6426832U JP S6426832 U JPS6426832 U JP S6426832U JP 12125987 U JP12125987 U JP 12125987U JP 12125987 U JP12125987 U JP 12125987U JP S6426832 U JPS6426832 U JP S6426832U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pump
- gas phase
- reduced
- pump system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010926 purge Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012808 vapor phase Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121259U JPH0729626Y2 (ja) | 1987-08-07 | 1987-08-07 | 減圧気相処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121259U JPH0729626Y2 (ja) | 1987-08-07 | 1987-08-07 | 減圧気相処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6426832U true JPS6426832U (cg-RX-API-DMAC7.html) | 1989-02-15 |
| JPH0729626Y2 JPH0729626Y2 (ja) | 1995-07-05 |
Family
ID=31368104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987121259U Expired - Lifetime JPH0729626Y2 (ja) | 1987-08-07 | 1987-08-07 | 減圧気相処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729626Y2 (cg-RX-API-DMAC7.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04194233A (ja) * | 1990-11-28 | 1992-07-14 | Fujimi Shizai Kk | コンクリート擁壁の緑化工法 |
| JPH0754427A (ja) * | 1992-04-28 | 1995-02-28 | Hokushiyou Kensetsu:Kk | 壁体の構築工法及びその装置 |
| JPH10220832A (ja) * | 1997-02-03 | 1998-08-21 | Mitsubishi Heavy Ind Ltd | 安全装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62280366A (ja) * | 1986-05-30 | 1987-12-05 | Hitachi Ltd | 減圧化学的気相堆積装置 |
-
1987
- 1987-08-07 JP JP1987121259U patent/JPH0729626Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62280366A (ja) * | 1986-05-30 | 1987-12-05 | Hitachi Ltd | 減圧化学的気相堆積装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04194233A (ja) * | 1990-11-28 | 1992-07-14 | Fujimi Shizai Kk | コンクリート擁壁の緑化工法 |
| JPH0754427A (ja) * | 1992-04-28 | 1995-02-28 | Hokushiyou Kensetsu:Kk | 壁体の構築工法及びその装置 |
| JPH10220832A (ja) * | 1997-02-03 | 1998-08-21 | Mitsubishi Heavy Ind Ltd | 安全装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729626Y2 (ja) | 1995-07-05 |