JPS6426704U - - Google Patents

Info

Publication number
JPS6426704U
JPS6426704U JP12050687U JP12050687U JPS6426704U JP S6426704 U JPS6426704 U JP S6426704U JP 12050687 U JP12050687 U JP 12050687U JP 12050687 U JP12050687 U JP 12050687U JP S6426704 U JPS6426704 U JP S6426704U
Authority
JP
Japan
Prior art keywords
block
reflective surface
optical member
protective film
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12050687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12050687U priority Critical patent/JPS6426704U/ja
Publication of JPS6426704U publication Critical patent/JPS6426704U/ja
Pending legal-status Critical Current

Links

JP12050687U 1987-08-07 1987-08-07 Pending JPS6426704U (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12050687U JPS6426704U (xx) 1987-08-07 1987-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12050687U JPS6426704U (xx) 1987-08-07 1987-08-07

Publications (1)

Publication Number Publication Date
JPS6426704U true JPS6426704U (xx) 1989-02-15

Family

ID=31366676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12050687U Pending JPS6426704U (xx) 1987-08-07 1987-08-07

Country Status (1)

Country Link
JP (1) JPS6426704U (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method

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