JPS6426704U - - Google Patents
Info
- Publication number
- JPS6426704U JPS6426704U JP12050687U JP12050687U JPS6426704U JP S6426704 U JPS6426704 U JP S6426704U JP 12050687 U JP12050687 U JP 12050687U JP 12050687 U JP12050687 U JP 12050687U JP S6426704 U JPS6426704 U JP S6426704U
- Authority
- JP
- Japan
- Prior art keywords
- block
- reflective surface
- optical member
- protective film
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Surface Treatment Of Optical Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12050687U JPS6426704U (de) | 1987-08-07 | 1987-08-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12050687U JPS6426704U (de) | 1987-08-07 | 1987-08-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6426704U true JPS6426704U (de) | 1989-02-15 |
Family
ID=31366676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12050687U Pending JPS6426704U (de) | 1987-08-07 | 1987-08-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6426704U (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10101666B2 (en) | 2007-10-12 | 2018-10-16 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
-
1987
- 1987-08-07 JP JP12050687U patent/JPS6426704U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10101666B2 (en) | 2007-10-12 | 2018-10-16 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
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