JPS6426378U - - Google Patents
Info
- Publication number
- JPS6426378U JPS6426378U JP12012987U JP12012987U JPS6426378U JP S6426378 U JPS6426378 U JP S6426378U JP 12012987 U JP12012987 U JP 12012987U JP 12012987 U JP12012987 U JP 12012987U JP S6426378 U JPS6426378 U JP S6426378U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- epitaxial layer
- substrate support
- melt holder
- cylindrical member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000155 melt Substances 0.000 claims description 5
- 239000007791 liquid phase Substances 0.000 claims description 4
- 239000003708 ampul Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12012987U JPS6426378U (enExample) | 1987-08-04 | 1987-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12012987U JPS6426378U (enExample) | 1987-08-04 | 1987-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426378U true JPS6426378U (enExample) | 1989-02-14 |
Family
ID=31365961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12012987U Pending JPS6426378U (enExample) | 1987-08-04 | 1987-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426378U (enExample) |
-
1987
- 1987-08-04 JP JP12012987U patent/JPS6426378U/ja active Pending